Madou, Marc J.
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Solid-state Physics, Fluidics, And Analytical Techniques In Micro- And Nanotechnology
Fundamentals Of Microfabrication And Nanotechnology, Three-volume Set
From MEMS to Bio-MEMS and Bio-NEMS
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
Manufacturing Techniques For Microfabrication And Nanotechnology
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